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Stress fields imparted with an ultrafast laser can correct low spatial frequency surface figure error of mirrors through ultrafast laser stress figuring (ULSF): the formation of nanograting structures within the bulk substrate generates localized stress, creating bending moments that equilibrize via wafer deformation. For ULSF to be used as an optical figuring process, the ultrafast laser generated stress must be effectively permanent or risk unwanted figure drift. Two isochronal annealing experiments were performed to measure ultrafast laser-generated stress stability in fused silica and Corning ultra-low expansion (ULE) wafers. The first experiment tracked changes to induced astigmatism up to 1000 °C on 25.4 mm-diameter wafers. Only small changes were measured after each thermal cycle up to 500 °C for both materials, but significant changes were observed at higher temperatures. The second experiment tracked stress changes in fused silica and ULE up to 500 °C but with 4 to 16× higher signal-to-noise ratio. Change in trefoil on 100 mm-diameter wafers was measured, and the induced stress in fused silica and ULE was found to be stable after thermal cycling up to 300 °C and 200 °C, respectively, with larger changes at higher temperatures.